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Introduction to Vacuum Technology

By David M. Hata

ISBN-10: 0-13-045018-9

ISBN-13: 978-0-13-045018-0What's this?

Published by Prentice Hall

Pub. Date: Jan 30, 2007

Format: Cloth

Table of Contents

Table of Contents

 

1.      Much Ado About Vacuum

2.      The Behavior of Cases

3.      Vacuum System Components and Characteristics

4.      Rough Vacuum Regime

5.      High Vacuum Regime

6.      Partial Pressure Analysis Using Residual Gas Analyzers

7.      Leak Detection in Vacuum Systems

8.      Gas Delivery and Pressure Control

9.      Safety Issues in Vacuum Systems

 

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