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Semiconductor Manufacturing Technology
ISBN-10: 0-13-081520-9
ISBN-13: 978-0-13-081520-0
Published by Prentice Hall
© 2001
Pub. Date: Nov 9, 2000
Format: Paper
Table of Contents
1. Introduction to the Semiconductor Industry.
2. Characteristics of Semiconductor Materials.
3. Device Technologies.
4. Silicon and Wafer Preparation.
5. Chemicals in Semiconductor Fabrication.
6. Contamination Controls in Wafer Fabs.
7. Metrology and Defect Inspection.
8. Gas Control in Process Chambers.
9. IC Fabrication Process Overview.
10. Oxidation.
11. Deposition.
12. Metallization.
13. Photolithography: Vapor Prime to Soft Bake.
14. Photolithography: Alignment and Exposure.
15. Photolithography: Photoresist Development and Advanced Lithography.
16. Etch.
17. Ion Implant.
18. Chemical Mechanical Planarization.
19. Wafer Test.
20. Assembly and Packaging.
Appendices.
Glossary.
Index.
This textbook is also sold in the various packages listed below. Before purchasing one of these packages, speak with your professor about which one will help you be successful in your course.
Package ISBN-13: 9780131041073
$199.47 | Add to Cart
This package contains:
- Semiconductor Manufacturing Technology
Michael Quirk, Julian Serda | ©2001 | Paper; 666 pages - Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices, 2nd Edition
Richard C. Jaeger | ©2002 | Paper; 316 pages
