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Table of Contents
1. Transducer Characteristics and Structures.
2. Contact, Resistive, and Electrode Elements.
3. Capacitive and Inductive Elements.
4. Transformer, Electrodynamic, Servo, and Resonant Elements.
5. Mechanical, Acoustical, and Flowmetering Elements.
6. Heat-Exchange Elements.
7. Characteristics of Solid-State Transducing Devices.
8. Fabrication of Microsensors.
9. Micromechanical Sensing and Actuating Structures.
10. Temperature-, Light-Sensitive Micro-Structures, and Fiber-Optic Sensors.
11. Miscellaneous Miniature Sensors.
12. Transducer Schemes.
Appendix: Tensors.
Illustrations.
References.
Index.
Textbook
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